Chucks and wafer end-effectors for the Semiconductor
Chucks and end-effectors are used to manipulate and carry silicon wafers through the whole production process. The chemical inertness of ceramics allows those components to be contamination-free for the wafer in particular in chemical wet etching baths.
These items enable the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.
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Ceramic components can be used in the following semiconductor process equipment :
- Deposition and ion implant machines
- Chemical wet etching equipment
- Failure-analysis machines
- Electrostatic chucks
Microcertec can offer the following products :
- Insulator plates for electrostatic chucks (E-chucks)
- Base plates for thermo chucks
- End-effectors
The most commonly used ceramic materials are :
- Alumina – or aluminium oxide – 99,6 % minimum
- Sintered and CVC silicon carbide.
All materials