Advanced Ceramics for
High-Tech Industries
Products : Components for the Semicon
Ceramic components offer significant advantages over metal and plastic parts. They retain their full dimensional stability at high temperatures – well above 1000°c. They show a high wear resistance. They are extremely good electrical insulators. They do not outgas in vacuum. Ceramics are inert materials that resist to many gases and acids.
Applications
We manufacture a wide range of components for the following applications :
- deposition equipment
- ion implant equipment
- wet spin-etch equipment
- failure-analysis equipment
Products
Mirocertec offers the following customised components :
- etch rings
- plates and frames for reactors
- high-voltage insulators
- gas-diffusion plates
- lifting pins & guides
- heating plates
Materials
For these applications, we mainly use the following advanced ceramics :
- alumina (94 to 99.8 %)
- sintered aluminium nitride – AlN
- zirconia
- sintered silicon carbide and SiC CVD
- silicon nitride
- quartz
- sapphire
- Macor ®
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Components for the Semicon (87.61 Ko)
