Advanced Ceramics for
High-Tech Industries
Products : End-effectors & chucks for wafer handling
Ceramic components offer significant advantages over metal and plastic parts. They retain their full dimensional stability at high temperatures – well above 1000°c. They show a high wear resistance. They are extremely good electrical insulators. They do not outgas in vacuum. Ceramics are inert materials that resist to many gases and acids.
Applications
Ceramic end-effectors and chucks are used in semicon-processing equipment :
- deposition and plasma etching
- ion implant
- wet spin-etch
- cleaning
- inspection
The handling of wafers is not subject to particle contamination with the use of ceramics because they are inert to chemicals.
Products
Mirocertec offers the following customised components :
Chucks
- insulating plates for electrostatic chucks
- heat plates
- suction plates
End-effectors
- with open vacuum channel
- with rest plots
- with fully-integrated vacuum channel
Materials
For these applications, we mainly use the following advanced ceramics :
- alumina (94 to 99.8 %) for its electrical insulation and mechanical resistance properties
- sintered aluminium nitride – AlN – due to its higher thermal dissipation but still offering perfect electrical insulation
- silicon carbide due to its good thermal conductivity
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Components for the Semicon (87.61 Ko)
